3-Axis-Micro-Manipulator — For motion with three degrees of freedom

There are many adjustment tasks in micro technology which require movements with three degrees of freedom. Micromotion GmbH has developed a 3-Axis-Micro-Manipulator for these types of applications. This compact unit with a diameter of only 36.2 mm and an axial length of less than 50 mm is fitted with two linear axes and one rotational axis. The linear axes are driven by eccentric actuators which move a small adjustment table in x- and y-directions. The theta-axis is on the adjustment table and it is used to drive the tool directly.

 

A design with the following advantages:

• Accuracy in the sub micrometer range

• Simple to control because stepper motors are used for all axes

• Low weight (< 50 g)

• Highly dynamic performance characteristics

 

 

Shorter assembly cycle times

Decisive advantages over piezoelectric drive technology are the large linear range of movement, simple control and high stability under production conditions. Typical applications include fine positioning, whereby the system is mounted on the rear of a high-speed axis; the unit's low weight is of particular significance here.

 

 

Higher dynamics

The trend to shorter and shorter cycle times for assembly tasks requires higher dynamics for the primary positioning axes, which are typically constructed with linear direct drives. When the mass of the Micro-Manipulator is minimised, then the temperature rise in linear motors is reduced for the same work cycle. Problems involving thermal instability are thus avoided, which has a strong influence on the positioning accuracy of the entire machine.