3-Axis-Micro-Manipulator — Technical data
x-axis |
y-axis |
Theta-axis |
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Adjustable stroke / angle |
1000 µm |
1000 µm |
> 360° |
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Speed |
Max. 2 mm/s |
Max. 2 mm/s |
100 rpm |
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Resolution — full step |
< 0.3 µm |
< 0.3 µm |
0.0860° |
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Resolution — micro step |
< 0.02 µm |
< 0.02 µm |
0.005° |
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Repeatability |
0.3 µm |
0.3 µm |
0.010° |
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Force / torque |
10 N |
10 N |
5 mNm |
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